Le Harzic Ronan, Schuck H, Sauer D, Anhut T, Riemann I, König K
Opt Express. 2005 Aug 22;13(17):6651-6. doi: 10.1364/opex.13.006651.
Techniques based on laser scanning microscopes for nanoprocessing of periodic structures on silicon with ultra-short laser pulses have been developed. Ripples of 800-900 nm spacing were obtained after laser irradiation at a wavelength of 1040 nm, a repetition rate of 10 kHz and a fluence of 2 J/cm2 in air. Smaller features of 70-100nm spacing were achieved in oil at a wavelength of 800 nm, a repetition rate of 90 MHz and a fluence of 200-300 mJ/cm2 by using a high numerical focusing objective.
基于激光扫描显微镜的技术已被开发出来，用于用超短激光脉冲对硅上的周期性结构进行纳米加工。在空气中，以波长1040nm、重复频率10kHz和能量密度2J/cm²进行激光辐照后，获得了间距为800 - 900nm的波纹。通过使用高数值聚焦物镜，在油中以波长800nm、重复频率90MHz和能量密度200 - 300mJ/cm²实现了间距为70 - 100nm的更小特征。
