Kumar Prashant, Kiran M S R N
Chemistry and Physics of Materials Unit (CPMU), Jawaharlal Nehru Centre for Advanced Scientific Research (JNCASR), Jakkur P O, Bangalore 560064, India.
Department of Materials Engineering, Indian Institute of Science (IISc), Bangalore 560012, India.
Sci Technol Adv Mater. 2010 May 13;11(2):025003. doi: 10.1088/1468-6996/11/2/025003. eCollection 2010 Apr.
Excimer laser irradiation at ambient temperature has been employed to produce nanostructured silicon surfaces. Nanoindentation was used to investigate the nanomechanical properties of the deformed surfaces as a function of laser parameters, such as the angle of incidence and number of laser pulses at a fixed laser fluence of 5 J cm. A single-crystal silicon [311] surface was severely damaged by laser irradiation and became nanocrystalline with an enhanced porosity. The resulting laser-treated surface consisted of nanometer-sized particles. The pore size was controlled by adjusting the angle of incidence and the number of laser pulses, and varied from nanometers to microns. The extent of nanocrystallinity was large for the surfaces irradiated at a small angle of incidence and by a high number of pulses, as confirmed by x-ray diffraction and Raman spectroscopy. The angle of incidence had a stronger effect on the structure and nanomechanical properties than the number of laser pulses.
在环境温度下采用准分子激光辐照来制备纳米结构的硅表面。使用纳米压痕技术研究变形表面的纳米力学性能与激光参数的关系，这些参数包括入射角以及在固定激光能量密度为5 J/cm²时的激光脉冲数。单晶硅[311]表面因激光辐照而受到严重损伤，变成了具有更高孔隙率的纳米晶体。所得的激光处理表面由纳米尺寸的颗粒组成。通过调整入射角和激光脉冲数来控制孔径，其范围从纳米到微米不等。如X射线衍射和拉曼光谱所证实的，对于以小入射角和高脉冲数辐照的表面，纳米结晶度的程度较大。入射角对结构和纳米力学性能的影响比激光脉冲数更强。
