具有非均匀膜的双电极电容式微机电超声换能器，用于高机电耦合系数和高带宽操作。
Dual-electrode CMUT with non-uniform membranes for high electromechanical coupling coefficient and high bandwidth operation.
作者信息
Guldiken Rasim O, Zahorian Jaime, Yamaner F Y, Degertekin F Levent
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2009 Jun;56(6):1270-6. doi: 10.1109/TUFFC.2009.1169.
Abstract
In this paper, we report measurement results on dual-electrode CMUT demonstrating electromechanical coupling coefficient (k(2)) of 0.82 at 90% of collapse voltage as well as 136% 3 dB one-way fractional bandwidth at the transducer surface around the design frequency of 8 MHz. These results are within 5% of the predictions of the finite element simulations. The large bandwidth is achieved mainly by utilizing a non-uniform membrane, introducing center mass to the design, whereas the dual-electrode structure provides high coupling coefficient in a large dc bias range without collapsing the membrane. In addition, the non-uniform membrane structure improves the transmit sensitivity of the dual-electrode CMUT by about 2dB as compared with a dual electrode CMUT with uniform membrane.
摘要
在本文中，我们报告了双电极电容式微机械超声换能器（CMUT）的测量结果，该换能器在90%的崩溃电压下机电耦合系数（k(2)）为0.82，并且在8 MHz设计频率附近的换能器表面处具有136%的3 dB单向分数带宽。这些结果在有限元模拟预测值的5%以内。大带宽主要是通过使用非均匀薄膜、在设计中引入中心质量来实现的，而双电极结构在较大的直流偏置范围内提供了高耦合系数，且不会使薄膜崩溃。此外，与具有均匀薄膜的双电极CMUT相比，非均匀薄膜结构使双电极CMUT的发射灵敏度提高了约2 dB。
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