Wise K D, Najafi K
Center for Integrated Sensors and Circuits, University of Michigan, Ann Arbor 48109.
Science. 1991 Nov 29;254(5036):1335-42. doi: 10.1126/science.1962192.
Integrated sensors and actuators are rapidly evolving to provide an important link between very large scale integrated circuits and nonelectronic monitoring and control applications ranging from biomedicine to automated manufacturing. As they continue to expand, entire microsystems merging electrical, mechanical, thermal, optical, magnetic, and perhaps chemical components should be possible on a common substrate.
集成传感器和执行器正在迅速发展，以在超大规模集成电路与从生物医学到自动化制造等非电子监测和控制应用之间提供重要联系。随着它们不断扩展，在同一基板上合并电气、机械、热、光学、磁性以及可能的化学组件的完整微系统应该是可行的。
