Costner Elizabeth A, Long Brian K, Navar Carlos, Jockusch Steffen, Lei Xuegong, Zimmerman Paul, Campion Alan, Turro Nicholas J, Willson C Grant
Department of Chemical Engineering, The University of Texas at Austin, Austin, Texas, USA.
J Phys Chem A. 2009 Aug 20;113(33):9337-47. doi: 10.1021/jp903435c.
VUV absorbance and index of refraction data for a series of linear and cyclic alkanes have been collected in order to understand the relationship between the electronic excitation wavelength (or absorbance edge), index of refraction, and molecular structure. The absorbance edge and index for a homologous series of both linear and cyclic alkanes increase with increasing carbon number. The optical properties of complex cycloalkanes do not vary predictably with increasing carbon number but instead depend on variations in the hydrocarbon structure in addition to hydrocarbon size. An understanding of the fundamental optical properties of this class of compounds is directly applicable to the identification of a high index and low-absorbance fluid for 193 nm immersion lithography.
为了理解电子激发波长（或吸收边）、折射率和分子结构之间的关系，已收集了一系列直链和环状烷烃的真空紫外吸收和折射率数据。直链和环状烷烃同系物的吸收边和折射率均随碳原子数的增加而增大。复杂环烷烃的光学性质并不随碳原子数的增加而呈现可预测的变化，而是除了烃类大小外，还取决于烃类结构的变化。对这类化合物基本光学性质的理解可直接应用于识别用于193nm浸没光刻的高折射率和低吸收流体。
