Keller Adrian, Roßbach Steven, Facsko Stefan, Möller Wolfhard
Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, PO Box 510119, D-01314 Dresden, Germany.
Nanotechnology. 2008 Apr 2;19(13):135303. doi: 10.1088/0957-4484/19/13/135303. Epub 2008 Feb 26.
The amorphized surface of Si(100) sputtered with low energy ions at moderate temperature was found to develop two perpendicular ripple patterns overlaying each other. The evolution of these patterns was studied over a wide range of fluence. Coarsening of both ripple modes was observed, showing a similar time dependence with a coarsening exponent of n approximately 0.08. In the high fluence regime, the surface enters a steady state with both ripple modes still present.
发现在中等温度下用低能离子溅射的Si(100)非晶化表面会形成两种相互叠加的垂直波纹图案。在很宽的注量范围内研究了这些图案的演变。观察到两种波纹模式都在粗化，显示出相似的时间依赖性，粗化指数n约为0.08。在高注量区域，表面进入稳态，两种波纹模式仍然存在。
