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用于像差校正扫描透射电子显微镜/电子能量损失谱的高能量分辨率单色仪。

High-energy-resolution monochromator for aberration-corrected scanning transmission electron microscopy/electron energy-loss spectroscopy.

作者信息

Krivanek Ondrej L, Ursin Jonathan P, Bacon Neil J, Corbin George J, Dellby Niklas, Hrncirik Petr, Murfitt Matthew F, Own Christopher S, Szilagyi Zoltan S

机构信息

Nion Company, 1102 8th Street, Kirkland, WA 98033, USA.

出版信息

Philos Trans A Math Phys Eng Sci. 2009 Sep 28;367(1903):3683-97. doi: 10.1098/rsta.2009.0087.

DOI:10.1098/rsta.2009.0087
PMID:19687060
Abstract

An all-magnetic monochromator/spectrometer system for sub-30 meV energy-resolution electron energy-loss spectroscopy in the scanning transmission electron microscope is described. It will link the energy being selected by the monochromator to the energy being analysed by the spectrometer, without resorting to decelerating the electron beam. This will allow it to attain spectral energy stability comparable to systems using monochromators and spectrometers that are raised to near the high voltage of the instrument. It will also be able to correct the chromatic aberration of the probe-forming column. It should be able to provide variable energy resolution down to approximately 10 meV and spatial resolution less than 1 A.

摘要

描述了一种用于扫描透射电子显微镜中能量分辨率低于30毫电子伏特的全磁单色仪/光谱仪系统。它将把单色仪选择的能量与光谱仪分析的能量联系起来,而无需使电子束减速。这将使其能够获得与使用提升到接近仪器高压的单色仪和光谱仪的系统相当的光谱能量稳定性。它还将能够校正探针形成柱的色差。它应该能够提供低至约10毫电子伏特的可变能量分辨率和小于1埃的空间分辨率。

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