Department of Electrical Engineering and Computer Sciences, University of California, Berkeley, Berkeley, California 94720, USA.
Opt Lett. 2009 Sep 1;34(17):2557-9. doi: 10.1364/OL.34.002557.
A bandwidth-tunable filter has been demonstrated based on a micro-electro-mechanical-system (MEMS) actuated single-crystalline silicon microtoroidal resonator. Bandwidth is tuned from 2.8 to 78.4 GHz by voltage control, the largest bandwidth tuning range reported to date to our knowledge in resonator-based filters. A 21.8 dB extinction ratio is attained as a dynamic add-drop filter.
基于微机电系统（MEMS）驱动的单晶硅微环形谐振器，演示了一种带宽可调滤波器。通过电压控制，带宽从 2.8GHz 调谐到 78.4GHz，据我们所知，这是目前基于谐振器滤波器中报道的最大带宽调谐范围。作为动态的 add-drop 滤波器，实现了 21.8dB 的消光比。
