Opt Lett. 2015 Aug 1;40(15):3556-9. doi: 10.1364/OL.40.003556.
We experimentally demonstrate a microelectromechanically (MEMS) tunable photonic ring resonator add-drop filter, fabricated in a simple silicon-on-insulator (SOI) based process. The device uses electrostatic parallel plate actuation to perturb the evanescent field of a silicon waveguide, and achieves a 530 pm resonance wavelength tuning, i.e., more than a fourfold improvement compared to previous MEMS tunable ring resonator add-drop filters. Moreover, our device has a static power consumption below 100 nW, and a tuning rate of -62 pm/V, i.e., the highest reported rate for electrostatic tuning of ring resonator add-drop filters.
我们实验演示了一种微机电系统（MEMS）可调光子环形谐振器分插滤波器，该滤波器采用简单的硅-绝缘体（SOI）工艺制造。该器件使用静电平行板致动来干扰硅波导的消逝场，实现了 530pm 的谐振波长调谐，与以前的 MEMS 可调环形谐振器分插滤波器相比，提高了四倍以上。此外，我们的器件静态功耗低于 100nW，调谐速率为-62pm/V，即报道的环形谐振器分插滤波器静电调谐的最高速率。
