Wang Wenhui, Wu Nan, Tian Ye, Wang Xingwei, Niezrecki Christopher, Chen Julie
Department of Electrical and Computer Engineering, University of Massachusetts Lowell, 1 University Ave., Lowell, MA 01854, USA.
Opt Express. 2009 Sep 14;17(19):16613-8. doi: 10.1364/OE.17.016613.
This paper presents a novel Fabry-Perot (FP) optical fiber pressure/acoustic sensor. It consists of two V-shaped grooves having different sized widths, a diaphragm on the surface of the larger V-groove, and a 45 degrees angle-polished fiber. The precision of FP cavity length is determined by the fabrication process of photolithography and anisotropic etching of a silicon crystal. Therefore, the cavity length can be controlled on the order of ten nm. Sensors were fabricated and tested. Test results indicate that the sensors' cavity lengths have been controlled precisely. The packaged sensor has demonstrated very good static and dynamic responses compared to a commercially available pressure sensor and a microphone.
本文提出了一种新型的法布里-珀罗（FP）光纤压力/声学传感器。它由两个宽度不同的V形槽、较大V形槽表面的一个隔膜以及一根45度角抛光光纤组成。FP腔长度的精度由硅晶体的光刻和各向异性蚀刻制造工艺决定。因此，腔长度可以控制在十纳米量级。制作并测试了传感器。测试结果表明传感器的腔长度已得到精确控制。与市售压力传感器和麦克风相比，封装后的传感器展现出了非常好的静态和动态响应。
