Wu Nan, Wang Wenhui, Tian Ye, Zou Xiaotian, Maffeo Michael, Niezrecki Christopher, Chen Julie, Wang Xingwei
Department of Electrical and Computer Engineering, University of Massachusetts Lowell, 1 University Avenue, Lowell, Massachusetts 01854, USA.
Opt Express. 2011 May 23;19(11):10797-804. doi: 10.1364/OE.19.010797.
This paper presents an optical pressure sensor based on a Fabry-Perot (FP) interferometer formed by a 45° angle polished single mode fiber and an external silicon nitride diaphragm. The sensor is comprised of two V-shape grooves with different widths on a silicon chip, a silicon nitride diaphragm released on the surface of the wider V-groove, and a 45° angle polished single mode fiber. The sensor is especially suitable for blast wave measurements: its compact structure ensures a high spatial resolution; its thin diaphragm based design and the optical demodulation scheme allow a fast response to the rapid changing signals experienced during blast events. The sensor shows linearity with the correlation coefficient of 0.9999 as well as a hysteresis of less than 0.3%. The shock tube test demonstrated that the sensor has a rise time of less than 2 µs from 0 kPa to 140 kPa.
本文介绍了一种基于法布里-珀罗（FP）干涉仪的光学压力传感器，该干涉仪由一根45°角抛光的单模光纤和一个外部氮化硅膜片构成。该传感器由硅芯片上两个宽度不同的V形槽、在较宽V形槽表面释放的氮化硅膜片以及一根45°角抛光的单模光纤组成。该传感器特别适用于冲击波测量：其紧凑的结构确保了高空间分辨率；基于薄膜片的设计和光学解调方案使其能够快速响应爆炸事件中快速变化的信号。该传感器具有线性度，相关系数为0.9999，滞后小于0.3%。激波管测试表明，该传感器从0 kPa到140 kPa的上升时间小于2微秒。
