发光二极管作为光刻环境中的替代环境照明源。

Light Emitting Diodes as an alternative ambient illumination source in photolithography environment.

作者信息

Corell Dennis, Ou Haiyan, Dam-Hansen Carsten, Petersen Paul-Michael, Friis Dan

机构信息

Department of Photonics Engineering, Technical University of Denmark 2800 Kgs. Lyngby, Denmark.

出版信息

Opt Express. 2009 Sep 28;17(20):17293-302. doi: 10.1364/OE.17.017293.

DOI:10.1364/OE.17.017293

PMID:19907515

Abstract

We explored an alternative light emitting diode (LED) - based solution to replace the existing yellow fluorescent light tubes (YFT) used in photolithography rooms. A no-blue LED lamp was designed and a prototype was fabricated. For both solutions, the spectral power distribution (SPD) was measured, the colorimetric values were calculated, and a visual comparison using Gretagmacbeth colorcharts was performed. The visual comparison showed that the LED bulb was better to render colors despite a low color rendering index (CRI). Furthermore, the LED bulb was tested in a photolithography room and there was no exposure to the photoresist even after 168 hours illumination.

摘要

我们探索了一种基于发光二极管（LED）的替代方案，以取代光刻室中现有的黄色荧光灯管（YFT）。设计了一种无蓝光LED灯并制作了一个原型。对于这两种解决方案，都测量了光谱功率分布（SPD），计算了色度值，并使用Gretagmacbeth比色卡进行了视觉比较。视觉比较表明，尽管显色指数（CRI）较低，但LED灯泡在呈现颜色方面更好。此外，该LED灯泡在光刻室中进行了测试，即使照明168小时后，光刻胶也未受到曝光。