Chao Weilun, Kim Jihoon, Rekawa Senajith, Fischer Peter, Anderson Erik H
Center for X-ray Optics, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley, CA 94720, USA.
Opt Express. 2009 Sep 28;17(20):17669-77. doi: 10.1364/OE.17.017669.
To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond.
为了将软X射线显微镜的分辨率提高到10纳米或更高水平，我们开发了一种用于菲涅耳波带片透镜的新型纳米制造工艺。这种基于双重光刻技术的新工艺，使我们能够制造出具有12纳米外区的高质量金波带片。在伯克利使用全场透射X射线显微镜XM-1对波带片进行测试，结果表明该透镜能够清晰分辨12纳米的线条和间距。这一结果代表着在实现10纳米及更高分辨率方面迈出了重要一步。
