Vila-Comamala Joan, Gorelick Sergey, Färm Elina, Kewish Cameron M, Diaz Ana, Barrett Ray, Guzenko Vitaliy A, Ritala Mikko, David Christian
Paul Scherrer Institut, Villigen, Switzerland.
Opt Express. 2011 Jan 3;19(1):175-84. doi: 10.1364/OE.19.000175.
X-ray microscopy based on Fresnel zone plates is a powerful technique for sub-100 nm resolution imaging of biological and inorganic materials. Here, we report on the modeling, fabrication and characterization of zone-doubled Fresnel zone plates for the multi-keV regime (4-12 keV). We demonstrate unprecedented spatial resolution by resolving 15 nm lines and spaces in scanning transmission X-ray microscopy, and focusing diffraction efficiencies of 7.5% at 6.2 keV photon energy. These developments represent a significant step towards 10 nm spatial resolution for hard X-ray energies of up to 12 keV.
基于菲涅耳波带片的X射线显微镜是一种用于对生物和无机材料进行亚100纳米分辨率成像的强大技术。在此，我们报告了用于多keV能区（4 - 12 keV）的双倍波带菲涅耳波带片的建模、制造和表征。我们通过在扫描透射X射线显微镜中分辨出15纳米的线条和间距，并在6.2 keV光子能量下实现了7.5%的聚焦衍射效率，展示了前所未有的空间分辨率。这些进展代表了朝着在高达12 keV的硬X射线能量下实现10纳米空间分辨率迈出的重要一步。
