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基于单个氧化锌纳米线的高性能场效应晶体管(FET)。

Single ZnO nanowire based high-performance field effect transistors (FETs).

作者信息

Park Yong Kyu, Umar Ahmad, Kim Jin-Seok, Yang H Y, Lee Jeong Su, Hahn Yoon-Bong

机构信息

School of Semiconductor and Chemical Engineering, BK21 Centre for Future Energy Materials and Devices, Nanomaterials Processing Research Centre, Chonbuk National University, Jeonju 561756, South Korea.

出版信息

J Nanosci Nanotechnol. 2009 Oct;9(10):5839-44. doi: 10.1166/jnn.2009.1252.

Abstract

The electrical properties of single ZnO nanowire were examined by fabricating single nanowire based field effect transistors (FETs) via two approaches, i.e., back- and top-gate approaches by using electron beam lithography (EBL) and photolithography processes. The ZnO nanowires were synthesized by non-catalytic simple thermal evaporation process by using metallic zinc powder in the presence of oxygen. The as-grown ZnO nanowires were characterized in terms of their structural and optical properties which confirmed that the grown nanowires are well-crystallized with the wurtzite hexagonal phase and exhibiting good optical properties. The peak transconductances of the back- and top-gate FETs were approximately 3.2 and approximately 7.4 nS, respectively. The field effect mobilities (micro(eff)) for the back- and top-gate FETs were measured to be 3.4 and 7.87 cm2/V x s, respectively. Our studies conclude that the fabricated top-gate FETs exhibited higher and good electrical properties as compared to ZnO nanowire FETs fabricated using back-gate approaches.

摘要

通过两种方法制备基于单根纳米线的场效应晶体管(FET),即使用电子束光刻(EBL)和光刻工艺的背栅和顶栅方法,来研究单根ZnO纳米线的电学性质。ZnO纳米线是通过在氧气存在下使用金属锌粉的非催化简单热蒸发工艺合成的。对生长后的ZnO纳米线进行了结构和光学性质表征,证实生长的纳米线具有纤锌矿六方相且结晶良好,并表现出良好的光学性质。背栅和顶栅FET的峰值跨导分别约为3.2和约7.4 nS。背栅和顶栅FET的场效应迁移率(μ(eff))分别测量为3.4和7.87 cm2/V·s。我们的研究得出结论,与使用背栅方法制备的ZnO纳米线FET相比,制备的顶栅FET表现出更高且良好的电学性质。

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