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基于结晶良好的氧化锌纳米线的场效应晶体管(FETs)。

Well-crystalline ZnO nanowire based field effect transistors (FETs).

作者信息

Kim S H, Umar Ahmad, Hwang S W, Al-Sayari S A, Abaker M, Al-Hajry A

机构信息

Collaborative Research Centre for Sensors and Electronic Devices (CRCSED), Centre for Advanced Materials and Nano-Engineering (CAMNE), Najran University, PO Box 1988, Najran 11001, Kingdom of Saudi Arabia.

出版信息

J Nanosci Nanotechnol. 2011 Jun;11(6):5102-7. doi: 10.1166/jnn.2011.4744.

Abstract

Well-crystalline ZnO nanowires were grown on Si(100) via non-catalytic thermal evaporation process using metallic zinc powder in presence of oxygen. The detailed morphological characterizations by field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM) confirmed that the synthesized products are nanowires with the typical diameter and lengths of approximately 55 +/- 5 nm and several micrometers, respectively and are grown in high density over the silicon substrate. The detailed structural characterizations by high-resolution TEM and X-ray diffraction confirmed that the synthesized nanowires are well-crystalline and possessing wurtzite hexagonal phase. The presence of Raman-active optical-phonon E2(high) mode at 437 cm(-1) in the Raman-scattering spectrum confirms good crystal quality for the as-grown ZnO nanowires. The electrical transport properties of the as-grown nanowires were explored by fabricating single nanowire based field effect transistors (FETs). The fabricated single ZnO nanowire based FET exhibits carrier concentration and electron mobility of approximately 7.49 x 10(17) cm(-3) and approximately 8.42 cm2V(-1)s(-1), respectively.

摘要

通过在氧气存在下使用金属锌粉的非催化热蒸发工艺,在硅(100)上生长出了结晶良好的氧化锌纳米线。通过场发射扫描电子显微镜(FESEM)和透射电子显微镜(TEM)进行的详细形态表征证实,合成产物是纳米线,其典型直径和约55±5纳米,长度约为几微米,并且在硅衬底上高密度生长。通过高分辨率TEM和X射线衍射进行的详细结构表征证实,合成的纳米线结晶良好且具有纤锌矿六方相。拉曼散射光谱中437 cm⁻¹处拉曼活性光学声子E2(高)模式的存在证实了生长态氧化锌纳米线具有良好的晶体质量。通过制造基于单纳米线的场效应晶体管(FET)来探索生长态纳米线的电输运特性。所制造的基于单个氧化锌纳米线的FET的载流子浓度和电子迁移率分别约为7.49×10¹⁷ cm⁻³和约8.42 cm²V⁻¹s⁻¹。

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