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用于电流体动力学(EHD)喷墨头的纳米级喷嘴的制造以及按需滴注操作的高精度图案化。

Fabrication of nanoscale nozzle for electrohydrodynamic (EHD) inkjet head and high precision patterning by drop-on-demand operation.

作者信息

Nguyen Vu Dat, Schrlau Michael G, Tran Si Bui Quang, Bau Haim H, Ko Han Seo, Byun Doyoung

机构信息

Department of Aerospace Information Engineering, Konkuk University, Seoul 143-701, Republic of Korea.

出版信息

J Nanosci Nanotechnol. 2009 Dec;9(12):7298-302. doi: 10.1166/jnn.2009.1772.

DOI:10.1166/jnn.2009.1772
PMID:19908776
Abstract

Electrohydrodynamic (EHD) spraying has been utilized in applications varying from micro-colloid thrusters to technology for film deposition and inkjet printing. Recently, EHD inkjet heads were developed to facilitate the fabrication of printed electronics such as digital displays, printed circuit boards (PCBs), and solar cells. Here, we report the fabrication and application of nanoscale nozzles for EHD inkjet printing. The nozzles were fabricated by depositing an electrically conductive layer on either the inside or outside of quartz micropipettes with sub-micron diameter tips. With the drop-on-demand control needed for inkjet heads, our nanoscale nozzles dispensed silver droplets in fine patterns on glass substrates.

摘要

电流体动力学(EHD)喷涂已应用于从微胶体推进器到薄膜沉积和喷墨打印技术等各种领域。最近,人们开发了EHD喷墨头,以促进印刷电子产品的制造,如数字显示器、印刷电路板(PCB)和太阳能电池。在此,我们报告了用于EHD喷墨打印的纳米级喷嘴的制造和应用。这些喷嘴是通过在直径为亚微米级的石英微量移液器的内部或外部沉积一层导电层而制成的。借助喷墨头所需的按需滴注控制,我们的纳米级喷嘴在玻璃基板上以精细图案喷出银滴。

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