Cohen Theodore A, Sharp David, Kluherz Kyle T, Chen Yueyang, Munley Christopher, Anderson Rayne T, Swanson Connor J, De Yoreo James J, Luscombe Christine K, Majumdar Arka, Gamelin Daniel R, Mackenzie J Devin
Molecular Engineering and Sciences Institute, University of Washington, Seattle, Washington 98195, United States.
Department of Physics, University of Washington, Seattle, Washington 98195, United States.
Nano Lett. 2022 Jul 27;22(14):5681-5688. doi: 10.1021/acs.nanolett.2c00473. Epub 2022 Jul 12.
Overcoming the challenges of patterning luminescent materials will unlock additive and more sustainable paths for the manufacturing of next-generation on-chip photonic devices. Electrohydrodynamic (EHD) inkjet printing is a promising method for deterministically placing emitters on these photonic devices. However, the use of this technique to pattern luminescent lead halide perovskite nanocrystals (NCs), notable for their defect tolerance and impressive optical and spin coherence properties, for integration with optoelectronic devices remains unexplored. In this work, we additively deposit nanoscale CsPbBr NC features on photonic structures via EHD inkjet printing. We perform transmission electron microscopy of EHD inkjet printed NCs to demonstrate that the NCs' structural integrity is maintained throughout the printing process. Finally, NCs are deposited with sub-micrometer control on an array of parallel silicon nitride nanophotonic cavities and demonstrate cavity-emitter coupling via photoluminescence spectroscopy. These results demonstrate EHD inkjet printing as a scalable, precise method to pattern luminescent nanomaterials for photonic applications.
克服发光材料图案化的挑战将为下一代片上光子器件的制造开辟更具可持续性的附加路径。电流体动力学（EHD）喷墨打印是一种很有前景的方法，可用于在这些光子器件上确定性地放置发光体。然而，利用该技术对发光卤化铅钙钛矿纳米晶体（NCs）进行图案化，以便与光电器件集成，这方面尚未得到探索，这些纳米晶体以其缺陷耐受性以及令人印象深刻的光学和自旋相干特性而闻名。在这项工作中，我们通过EHD喷墨打印在光子结构上附加沉积纳米级CsPbBr NC特征。我们对EHD喷墨打印的NCs进行透射电子显微镜分析，以证明NCs的结构完整性在整个打印过程中得以保持。最后，在一系列平行的氮化硅纳米光子腔上以亚微米级精度沉积NCs，并通过光致发光光谱证明腔 - 发射体耦合。这些结果表明，EHD喷墨打印是一种可扩展、精确的方法，用于为光子应用对发光纳米材料进行图案化。
