在硅纳米尖上制备的室温二氧化锡薄膜气体传感器。

Room temperature SnO2 thin film gas sensor fabricated on Si nanospikes.

作者信息

Huo H B, Wang C, Yan F D, Ren H Z, Shen M Y

机构信息

Department of Physics, University of Massachusetts Lowell, One University Avenue, Lowell, Massachusetts 01854, USA.

出版信息

J Nanosci Nanotechnol. 2009 Aug;9(8):4817-9. doi: 10.1166/jnn.2009.1218.

DOI:10.1166/jnn.2009.1218

PMID:19928155

Abstract

The SnO2 thin film CO gas sensors have been fabricated on silicon nanostructured surface made using a femtosecond pulsed laser irradiation. The measurement shows a significant response to the CO gas at room temperature. While a SnO2 sensor fabricated on a flat surface shows no response when CO gas exists at room temperature. The high area/volume ratio and sharp structures of the nanospikes enhance the sensitivity of SnO2 at room temperature.

摘要

二氧化锡薄膜一氧化碳气体传感器已制备在通过飞秒脉冲激光辐照制成的硅纳米结构表面上。测量结果表明，该传感器在室温下对一氧化碳气体有显著响应。而在平坦表面上制备的二氧化锡传感器在室温下存在一氧化碳气体时则无响应。纳米尖峰的高面积/体积比和尖锐结构提高了二氧化锡在室温下的灵敏度。