一种基于外差干涉测量法的用于测量直线度及其位置的激光干涉仪。

A laser interferometer for measuring straightness and its position based on heterodyne interferometry.

作者信息

Chen Benyong, Zhang Enzheng, Yan Liping, Li Chaorong, Tang Wuhua, Feng Qibo

机构信息

Nanometer Measurement Lab, Zhejiang Sci-tech University, Hangzhou 310018, China.

出版信息

Rev Sci Instrum. 2009 Nov;80(11):115113. doi: 10.1063/1.3266966.

DOI:10.1063/1.3266966

PMID:19947763

Abstract

Not only the magnitude but also the position of straightness errors are of concern to users. However, current laser interferometers used for measuring straightness seldom give the relative position of the straightness error. To solve this problem, a laser interferometer for measuring straightness and its position based on heterodyne interferometry is proposed. The optical configuration of the interferometer is designed and the measurement principle is analyzed theoretically. Two experiments were carried out. The first experiment verifies the validity and repeatability of the interferometer by measuring a linear stage. Also, the second one for measuring a flexure-hinge stage demonstrates that the interferometer is capable of nanometer measurement accuracy. These results show that this interferometer has advantages of simultaneously measuring straightness error and the relative position with high precision, and a compact structure.

摘要

用户不仅关心直线度误差的大小，还关心其位置。然而，目前用于测量直线度的激光干涉仪很少给出直线度误差的相对位置。为了解决这个问题，提出了一种基于外差干涉测量法的直线度及其位置测量激光干涉仪。设计了干涉仪的光学结构，并从理论上分析了测量原理。进行了两个实验。第一个实验通过测量一个直线运动平台验证了干涉仪的有效性和重复性。此外，第二个测量柔性铰链平台的实验表明该干涉仪能够达到纳米级的测量精度。这些结果表明，该干涉仪具有同时高精度测量直线度误差和相对位置的优点，并且结构紧凑。