Zhang Xin, Wong Wai Man, Zhang Yulong, Zhang Yandong, Gao Fei, Nelson Richard D, Larue John C
Z&L Creative Corporation, Lewes, DE 19958, USA.
Annu Int Conf IEEE Eng Med Biol Soc. 2009;2009:3814-7. doi: 10.1109/IEMBS.2009.5335152.
In this paper we present the design and prototyping of a 24-channel mixed signal full-customized CMOS integrated biosensor chip for in vitro extracellular recording of neural signals. Design and implementation of hierarchical modules including microelectrode electrophysiological sensors, analog signal buffers, high gain amplifier and control/interface units are presented in detail. The prototype chip was fabricated by MOSIS with AMI C5 0.5 microm, double poly, triple metal layer CMOS technology. The electroless gold plating process is used to replace the aluminum material obtained from the standard CMOS process with biocompatible metal gold in the planner microelectrode array sensors to prevent cell poisoning and undesirable electrochemical corrosion. The biosensor chip provides a satisfactory signal-to-noise ratio for neural signals with amplitudes and frequencies within the range of 600microV - 2mV and 100 Hz to 10KHz, respectively.
在本文中，我们展示了一款用于体外神经信号细胞外记录的24通道混合信号全定制CMOS集成生物传感器芯片的设计与原型制作。详细介绍了包括微电极电生理传感器、模拟信号缓冲器、高增益放大器以及控制/接口单元在内的分层模块的设计与实现。该原型芯片由MOSIS采用AMI C5 0.5微米、双多晶硅、三层金属层CMOS技术制造。在平面微电极阵列传感器中，采用化学镀金工艺用生物相容性金属金替代从标准CMOS工艺获得的铝材料，以防止细胞中毒和不良的电化学腐蚀。该生物传感器芯片对于幅度在600微伏至2毫伏范围内、频率在100赫兹至10千赫兹范围内的神经信号提供了令人满意的信噪比。
