Ahn Jeongho, Kim Jong-Ahn, Kang Chu-Shik, Kim Jae-Wan, Kim Soohyun
Division of Mechanical Engineering, KAIST, 335 Gwahangno, Yuseong-gu, Daejeon, 305-701, Republic of Korea.
Opt Express. 2009 Nov 9;17(23):21042-9. doi: 10.1364/OE.17.021042.
An interferometer having fourteen times higher resolution than a conventional single-pass interferometer has been developed by making multiple-pass optical path. To embody the multiple-pass optical configuration, a two-dimensional corner cube array block was designed, and its symmetric structure minimized the measurement error. The effect from the alignment error and the imperfection of corner cube is calculated as picometer level. An experiment proves that the suggested interferometer has about 45 nm of optical resolution and its nonlinearity is about 0.5 nm in peak-to-valley.
通过构建多程光路，已开发出一种分辨率比传统单通道干涉仪高14倍的干涉仪。为实现多程光学配置，设计了一种二维角锥棱镜阵列块，其对称结构将测量误差降至最低。角锥棱镜对准误差和不完善性所产生的影响计算为皮米级别。实验证明，所提出的干涉仪具有约45纳米的光学分辨率，其峰谷非线性约为0.5纳米。
