Department of Mechanical Science and Engineering, University of Illinois at Urbana-Champaign, Urbana, IL, USA.
Nanotechnology. 2012 Jan 27;23(3):035401. doi: 10.1088/0957-4484/23/3/035401. Epub 2011 Dec 16.
We report thermoelectric voltage measurements between the platinum-coated tip of a heated atomic force microscope (AFM) cantilever and a gold-coated substrate. The cantilevers have an integrated heater-thermometer element made from doped single crystal silicon, and a platinum tip. The voltage can be measured at the tip, independent from the cantilever heating. We used the thermocouple junction between the platinum tip and the gold substrate to measure thermoelectric voltage during heating. Experiments used either sample-side or tip-side heating, over the temperature range 25-275 °C. The tip-substrate contact is ∼4 nm in diameter and its average measured Seebeck coefficient is 3.4 μV K(-1). The thermoelectric voltage is used to determine tip-substrate interface temperature when the substrate is either glass or quartz. When the non-dimensional cantilever heater temperature is 1, the tip-substrate interface temperature is 0.593 on glass and 0.125 on quartz. Thermal contact resistance between the tip and the substrate heavily influences the tip-substrate interface temperature. Measurements agree well with modeling when the tip-substrate interface contact resistance is 10(8) K W(-1).
我们报告了在加热原子力显微镜（AFM）悬臂的镀铂金尖端和镀金基底之间进行的热电电压测量。这些悬臂具有由掺杂单晶硅制成的集成加热-温度计元件和铂金尖端。可以在尖端独立于悬臂加热来测量电压。我们使用铂金尖端和金基底之间的热电偶结在加热过程中测量热电电压。实验在 25-275°C 的温度范围内使用样品侧或尖端侧加热。尖端-基底接触的直径约为 4nm，其平均测量的塞贝克系数为 3.4μV K(-1)。当基底为玻璃或石英时，热电电压用于确定尖端-基底界面温度。当无量纲悬臂加热器温度为 1 时，玻璃上的尖端-基底界面温度为 0.593，石英上为 0.125。尖端和基底之间的热接触电阻对尖端-基底界面温度有很大影响。当尖端-基底界面接触电阻为 10(8) K W(-1)时，测量结果与模型吻合良好。
