Ming Hsieh Department of Electrical Engineering, University of Southern California, Los Angeles, CA 90089, USA.
Lab Chip. 2010 Jan 7;10(1):101-10. doi: 10.1039/b910248e. Epub 2009 Oct 19.
We present a low power, on demand Parylene MEMS electrothermal valve. A novel Omega-shaped thermal resistive element requires low power (approximately mW) and enables rapid valve opening (approximately ms). Using both finite element analysis and valve opening experiments, a robust resistive element design for improved valve opening performance in water was obtained. In addition, a thermistor, as an inrush current limiter, was added into the valve circuit to provide variable current ramping. Wireless activation of the valve using RF inductive power transfer was demonstrated.
我们提出了一种低功耗、按需的派瑞林 MEMS 电热阀。一种新颖的 Omega 形状的热电阻元件需要低功率(约 mW),并能实现快速阀打开(约 ms)。通过有限元分析和阀打开实验,获得了一种改进水阀开启性能的稳健电阻元件设计。此外,在阀电路中添加了一个热敏电阻作为浪涌电流限制器,以提供可变的电流斜坡。使用射频感应功率传输对阀进行无线激活的功能也得到了验证。