Lee Joonhee, Ahn Sungmo, Chang Hojun, Kim Jaehoon, Park Yeonsang, Jeon Heonsu
Department of Physics and Astronomy & Inter-university Semiconductor Research Center, Seoul National University, Seoul 151-747, Korea.
Opt Express. 2009 Dec 7;17(25):22535-42. doi: 10.1364/OE.17.022535.
This study proposes a one-dimensional sub-wavelength grating structure on GaN surface which behaves as a reflector for transverse-electric polarized light in the blue wavelength range. The rigorous coupled-wave analysis method was used to analyze the effects of various structural parameters on the reflectance spectra of the grating. Based on the optimal design, a GaN surface grating reflector (SGR) was fabricated using holographic lithography and dry etching processes. It showed reflectance that exceeded 90% over a 60-nm bandwidth. The obtained experimental results were in good agreement with simulated ones. The SGR has an advantage of structural simplicity, which should greatly facilitate the fabrication and integration of high reflectors on GaN-based short-wavelength photonic devices.
本研究提出了一种在氮化镓（GaN）表面的一维亚波长光栅结构，该结构在蓝光波长范围内对横向电偏振光起到反射器的作用。采用严格耦合波分析方法来分析各种结构参数对光栅反射光谱的影响。基于优化设计，利用全息光刻和干法蚀刻工艺制备了一个GaN表面光栅反射器（SGR）。它在60纳米带宽上显示出超过90%的反射率。所获得的实验结果与模拟结果吻合良好。该SGR具有结构简单的优点，这将极大地便于在基于GaN的短波长光子器件上制造和集成高反射器。
