Ulrich R
Appl Opt. 1969 Feb 1;8(2):319-22. doi: 10.1364/AO.8.000319.
Capacitive grids and similar structures, to be used as reflectors in far ir interference filters, are prepared from a 1-micro thick copper layer supported by a 2.5-micro thick dielectric film. The desired pattern is obtained by simple photolithographic contact printing of a suitable negative. The essential steps of this preparation and the generation of some relevant patterns are described.
用作远红外干涉滤光片反射器的电容性栅格及类似结构,是由一层2.5微米厚的介电膜支撑的1微米厚铜层制备而成。通过对合适底片进行简单的光刻接触印刷可获得所需图案。本文描述了该制备方法的基本步骤以及一些相关图案的生成。