Aspnes D E, Studna A A
Appl Opt. 1971 May 1;10(5):1024-30. doi: 10.1364/AO.10.001024.
A procedure is outlined in which the symmetry of the ellipsometer is used to provide the information needed for its own alignment. Alignment is based upon four null measurements taken on a transparent reflecting surface. These are related to the tilt angles of the polarizer and analyzer telescope arms, and reference angles for which the transmitted polarization vectors of the analyzer and polarizer prisms lie in the plane of incidence. The alignment is not affected by the presence of small parasitic ellipticities induced by defects in either polarizer or analyzer prisms. A step-by-step procedure for ellipsometer alignment, which requires only equipment necessary for normal operation of the instrument, is given.
本文概述了一种利用椭偏仪的对称性来提供其自身对准所需信息的方法。对准基于在透明反射表面上进行的四次零测量。这些测量与偏振器和分析器望远镜臂的倾斜角度以及分析器和偏振器棱镜的透射偏振矢量位于入射平面内的参考角度有关。对准不受偏振器或分析器棱镜中的缺陷所引起的小寄生椭圆率的影响。文中给出了椭偏仪对准的分步程序，该程序仅需要仪器正常运行所需的设备。
