Obraztsov Alexander N, Kopylov Petr G, Loginov Boris A, Dolganov Mathew A, Ismagilov Rinat R, Savenko Natalia V
Department of Physics, Moscow State University, Moscow 119991, Russia.
Rev Sci Instrum. 2010 Jan;81(1):013703. doi: 10.1063/1.3280182.
Single crystal diamond tips with perfect pyramidal geometry were obtained by a combination of chemical vapor deposition and selective oxidation of polycrystalline films. The parameters of the deposition process were chosen to provide growth of a textured film consisting of micrometer sized diamond crystallites embedded into nanodiamond ballas-like material. The heating of the film in an air environment was used for selective oxidation of the nanodiamond component. The films obtained contain free standing pyramidal single crystal diamond tips oriented by their apexes to the substrate surface. The tips were used for the fabrication of atomic force microscopy probes and their evaluation in comparison to common silicon probes.
通过化学气相沉积和多晶膜的选择性氧化相结合的方法，获得了具有完美金字塔几何形状的单晶金刚石尖端。选择沉积过程的参数，以促进由嵌入纳米金刚石类球粒材料中的微米级金刚石微晶组成的织构膜的生长。在空气环境中对膜进行加热，用于纳米金刚石组分的选择性氧化。所获得的膜包含独立的金字塔形单晶金刚石尖端，其尖端朝向衬底表面。这些尖端用于制造原子力显微镜探针，并与普通硅探针进行比较评估。
