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自组装爆轰纳米金刚石上的多晶金刚石:制造全金刚石预制微部件的可行途径。

Polycrystalline diamond on self-assembled detonation nanodiamond: a viable route for fabrication of all-diamond preformed microcomponents.

作者信息

Terranova M L, Orlanducci S, Tamburri E, Guglielmotti V, Toschi F, Hampai D, Rossi M

机构信息

Dipartimento di Scienze e Tecnologie Chimiche, MINASlab, Università di Roma 'Tor Vergata', Via della Ricerca Scientifica, 00133 Roma, Italy.

出版信息

Nanotechnology. 2008 Oct 15;19(41):415601. doi: 10.1088/0957-4484/19/41/415601. Epub 2008 Sep 4.

DOI:10.1088/0957-4484/19/41/415601
PMID:21832646
Abstract

Surface assisted self-assembly of detonation nanodiamond particles (with typical sizes in the range 4-10 nm) has been obtained using different fractions of colloidal aqueous dispersions as starting material. The relationship between dispersion properties and structure/geometry of the aggregates deposited on Si or glass plates has been investigated. A series of differently shaped free-standing nanodiamond structures has been prepared, analysed and used as templates for the growth of polycrystalline diamond layers by the chemical vapour deposition (CVD) technique. The possibility of obtaining textured coating with a relatively strong [Formula: see text] preferred orientation (within a solid angle of about 0.6 srad) is also reported. Overall, the coupling of nanodiamond self-assembling to the CVD diamond growth enables one to produce specimens with complex 3D architectures. The proposed microfabrication methodology could represent a viable route for the production of free-standing all-diamond microcomponents, with tailored shapes and predefined crystalline features, to be used for advanced electronic applications.

摘要

使用不同比例的胶态水分散体作为起始材料,实现了爆轰纳米金刚石颗粒(典型尺寸在4 - 10纳米范围内)的表面辅助自组装。研究了分散特性与沉积在硅或玻璃板上的聚集体的结构/几何形状之间的关系。制备、分析了一系列不同形状的独立纳米金刚石结构,并将其用作通过化学气相沉积(CVD)技术生长多晶金刚石层的模板。还报道了获得具有相对较强[公式:见原文]择优取向(在约0.6球面度的立体角内)的织构涂层的可能性。总体而言,纳米金刚石自组装与CVD金刚石生长的结合使得能够生产具有复杂三维结构的样品。所提出的微加工方法可能代表了一种可行的途径,用于生产具有定制形状和预定义晶体特征的独立全金刚石微部件,以用于先进电子应用。

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