Andany Santiago H, Hlawacek Gregor, Hummel Stefan, Brillard Charlène, Kangül Mustafa, Fantner Georg E
Laboratory for Bio- and Nano-Instrumentation, Swiss Federal Institute of Technology Lausanne (EPFL), Lausanne CH-1015, Switzerland.
Institute of Ion Beam Physics and Materials Research, Helmholtz-Zentrum Dresden-Rossendorf, Dresden 01328, Germany.
Beilstein J Nanotechnol. 2020 Aug 26;11:1272-1279. doi: 10.3762/bjnano.11.111. eCollection 2020.
In this work, we report on the integration of an atomic force microscope (AFM) into a helium ion microscope (HIM). The HIM is a powerful instrument, capable of imaging and machining of nanoscale structures with sub-nanometer resolution, while the AFM is a well-established versatile tool for multiparametric nanoscale characterization. Combining the two techniques opens the way for unprecedented in situ correlative analysis at the nanoscale. Nanomachining and analysis can be performed without contamination of the sample and environmental changes between processing steps. The practicality of the resulting tool lies in the complementarity of the two techniques. The AFM offers not only true 3D topography maps, something the HIM can only provide in an indirect way, but also allows for nanomechanical property mapping, as well as for electrical and magnetic characterization of the sample after focused ion beam materials modification with the HIM. The experimental setup is described and evaluated through a series of correlative experiments, demonstrating the feasibility of the integration.
在这项工作中，我们报告了将原子力显微镜（AFM）集成到氦离子显微镜（HIM）中的情况。HIM是一种强大的仪器，能够以亚纳米分辨率对纳米级结构进行成像和加工，而AFM是一种成熟的用于多参数纳米级表征的通用工具。将这两种技术结合起来为前所未有的纳米级原位相关分析开辟了道路。纳米加工和分析可以在不污染样品且加工步骤之间不发生环境变化的情况下进行。所得工具的实用性在于这两种技术的互补性。AFM不仅能提供真正的三维地形图（这是HIM只能间接提供的），还能进行纳米力学性能映射，以及在用HIM进行聚焦离子束材料改性后对样品进行电学和磁学表征。通过一系列相关实验对实验装置进行了描述和评估，证明了这种集成的可行性。
