Firester A H, Heller M E, Sheng P
Appl Opt. 1977 Jul 1;16(7):1971-4. doi: 10.1364/AO.16.001971.
This note describes a convenient working technique for measuring the minimum size focused spot formed by a lens system. The technique is routinely capable of measurement precision of better than ?lambda. The theory of knife-edge scanning is presented, and the relationship of the measured spot profile to the actual spot profile is shown to be relatively insensitive to the acceptance solid angle of the photodetector. Finally, some typical results of high resolution microscope objectives are presented.
本笔记描述了一种用于测量透镜系统形成的最小聚焦光斑尺寸的便捷工作技术。该技术通常能够实现优于λ的测量精度。文中介绍了刀口扫描理论，并表明测量光斑轮廓与实际光斑轮廓之间的关系对光电探测器的接收立体角相对不敏感。最后，给出了一些高分辨率显微镜物镜的典型测量结果。
