Electronics Engineering Department, Bilkent University, Ankara, Turkey.
IEEE Trans Ultrason Ferroelectr Freq Control. 2010;57(2):448-54. doi: 10.1109/TUFFC.2010.1425.
In this work, we propose a novel method to increase the quality factor of extensional mode micromechanical resonators. The proposed resonator topology is suitable for integration in a silicon-based process to fabricate micromechanical filters and oscillators. It is a half-wavelength-long strip excited longitudinally by electrostatic forces, and it is isolated from the substrate by alternating with bars of a quarter wavelength long. This structure causes a large impedance mismatch between the resonator and the substrate and hence reduces the anchor loss considerably. The performance of the resonator is determined by finite element simulations. We introduce an equivalent electrical circuit to predict the performance of the resonator. The electrical model gives results consistent with the finite element simulations. The proposed resonator is expected to have a very small anchor loss resulting in a very high Q.
在这项工作中，我们提出了一种提高伸展模式微机械谐振器品质因数的新方法。所提出的谐振器拓扑结构适合于集成在基于硅的工艺中，以制造微机械滤波器和振荡器。它是一个半波长长的条带，通过静电力纵向激励，并通过交替四分之一波长长的条带与基底隔离。这种结构导致谐振器与基底之间的阻抗失配很大，从而大大减少了锚定损耗。谐振器的性能由有限元模拟确定。我们引入了一个等效电路来预测谐振器的性能。该电模型给出的结果与有限元模拟一致。预计所提出的谐振器将具有非常小的锚定损耗，从而具有非常高的 Q 值。
