Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China.
Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China.
Sensors (Basel). 2023 Apr 7;23(8):3808. doi: 10.3390/s23083808.
This work presents a silicon-based capacitively transduced width extensional mode (WEM) MEMS rectangular plate resonator with quality factor () of over 10,000 at a frequency of greater than 1 GHz. The value, determined by various loss mechanisms, was analyzed and quantified via numerical calculation and simulation. The energy loss of high order WEMs is dominated by anchor loss and phonon-phonon interaction dissipation (PPID). High-order resonators possess high effective stiffness, resulting in large motional impedance. To suppress anchor loss and reduce motional impedance, a novel combined tether was designed and comprehensively optimized. The resonators were batch fabricated based on a reliable and simple silicon-on-insulator (SOI)-based fabrication process. The combined tether experimentally contributes to low anchor loss and motional impedance. Especially in the 4th WEM, the resonator with a resonance frequency of 1.1 GHz and a of 10,920 was demonstrated, corresponding to the promising × product of 1.2 × 10. By using combined tether, the motional impedance decreases by 33% and 20% in 3rd and 4th modes, respectively. The WEM resonator proposed in this work has potential application for high-frequency wireless communication systems.
本工作提出了一种基于硅的电容式激励宽度拉伸模式（WEM）MEMS 矩形板谐振器，其品质因数（Q 值）超过 10000，频率大于 1GHz。通过数值计算和模拟分析和量化了由各种损耗机制决定的 Q 值。高阶 WEM 的能量损耗主要由锚定损耗和声子-声子相互作用耗散（PPID）决定。高阶谐振器具有高的有效刚度，导致大的运动阻抗。为了抑制锚定损耗和降低运动阻抗，设计了一种新颖的组合系绳，并进行了全面优化。谐振器基于可靠且简单的绝缘体上硅（SOI）制造工艺进行批量制造。组合系绳在实验中有助于降低锚定损耗和运动阻抗。特别是在第 4 阶 WEM 中，展示了具有 1.1GHz 谐振频率和 10920 的 Q 值的谐振器，对应的有前途的乘积为 1.2×10。通过使用组合系绳，第 3 阶和第 4 阶模式的运动阻抗分别降低了 33%和 20%。本工作提出的 WEM 谐振器具有在高频无线通信系统中的潜在应用。
