Vizir A V, Tyunkov A V, Shandrikov M V, Oks E M
Institute of High Current Electronics, Russian Academy of Sciences, Tomsk 634055, Russia.
Rev Sci Instrum. 2010 Feb;81(2):02B903. doi: 10.1063/1.3264640.
The paper presents the results of tests of a new compact two-stage bulk gas plasma gun. The plasma gun is based on a nonself-sustained gas discharge with an electron emitter based on a discharge with a self-heating hollow cathode. The operating characteristics of the plasma gun are investigated. The discharge system makes it possible to produce uniform and stable gas plasma in the dc mode with a plasma density up to 3x10(9) cm(-3) at an operating gas pressure in the vacuum chamber of less than 2x10(-2) Pa. The device features high power efficiency, design simplicity, and compactness.
本文介绍了一种新型紧凑型两级体气体等离子体喷枪的测试结果。该等离子体喷枪基于非自持气体放电，其电子发射器基于具有自热空心阴极的放电。研究了等离子体喷枪的运行特性。该放电系统能够在直流模式下产生均匀且稳定的气体等离子体，在真空室中工作气体压力小于2×10⁻² Pa时，等离子体密度可达3×10⁹ cm⁻³ 。该装置具有高功率效率、设计简单和紧凑的特点。
