Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences, Ningbo 315201, China.
Opt Lett. 2010 Mar 1;35(5):727-9. doi: 10.1364/OL.35.000727.
The transmission phase grating on anodic alumina membrane (AAM) was fabricated by a lithography and chemical etching method to demonstrate the feasibility of fabricating diffractive optical elements on AAM matrix. The monochromatic light diffraction property of the sample grating was tested using lasers with wavelengths of 532 and 650 nm, respectively. The measured diffraction efficiencies of zeroth and first orders were in good agreement with the calculated results. This method may offer an approach to prepare surface pattern on alumina and could be used in fabricating diffractive optical components such as linear gratings.
采用光刻和化学刻蚀的方法在阳极氧化铝模板上制备了位相型传输光栅，验证了在氧化铝模板上制作衍射光学元件的可行性。利用 532nm 和 650nm 激光对样品光栅的单色光衍射特性进行了测试，零级和一级衍射效率的测量值与理论值吻合较好。该方法为在氧化铝表面制备图形提供了一种途径，可用于制作线栅等衍射光学元件。
