Liu Ying, Fuchs Hans-Jörg, Liu Zhengkun, Chen Huoyao, He Shengnan, Fu Shaojun, Kley Ernst-Bernhard, Tünnermann Andreas
Institut für Angewandte Physik, Friedrich-Schiller-Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany.
Appl Opt. 2010 Aug 10;49(23):4450-9. doi: 10.1364/AO.49.004450.
Laminar-type gratings as soft x-ray beam splitters for interferometry are presented. Gold-coated grating beam splitters with 1000 lines/mm are designed for grazing incidence operation at 13.9 nm. They are routinely fabricated using electron beam lithography and ion etching techniques. The laminar grating is measured to have almost equal absolute efficiencies of about 20% in the zeroth and -1st orders, which enables a fringe visibility up to 0.99 in the interferometer. The discrepancy of the grating profiles between the optimized theoretical and the experimental results is analyzed according to the comparison of the optimized simulation results and the measurement realization of the grating efficiencies. By a precise control of the grating profile, the grating efficiency in the -1st order and the fringe visibility could be improved to 25% and 1, respectively.
本文介绍了用于干涉测量的层状光栅作为软X射线分束器。设计了线密度为1000线/毫米的镀金光栅分束器，用于13.9纳米的掠入射操作。它们通常采用电子束光刻和离子蚀刻技术制造。测量得到层状光栅在零级和一级的绝对效率几乎相等，约为20%，这使得干涉仪中的条纹可见度高达0.99。根据优化模拟结果与光栅效率测量结果的比较，分析了优化理论与实验结果之间光栅轮廓的差异。通过精确控制光栅轮廓，一级光栅效率和条纹可见度可分别提高到25%和1。
