Strain induced anisotropy in As(2)S(3), As(2)Se(3), and ZnSe films on KCI substrates via 10.6-microm and 0.6328-microm ellipsometer measurements and 0.6328-microm reflector measurements.

Ellipsometric measurements at 10.6 microm using a modulated light ellipsometer and ellipsometer and reflectometer measurements at 0.6328 microm are reported for the refractive indices of As(2)S(3), As(2)Se(3), and ZnS films deposited on KCl substrates. The observation of strain-induced anisotropy is reported, and an analysis of the effects of anisotropy in thin film ellipsometry is presented.