Speer R J, Chrisp M, Turner D, Mrowka S, Tregidgo K
Appl Opt. 1979 Jun 15;18(12):2003-12. doi: 10.1364/AO.18.002003.
A simple interferometric method capable of displaying quantitatively the wave front aberration of any image-forming optical system is described. Its application for testing and aligning grazing incidence reflection optics at the same conjugates as those of short-wavelength use is demonstrated. The image-forming wave front from the system being tested is compared with a true spherical wave front generated within the interferometer from a point at the intended focus. The differences are displayed as a fringe pattern superimposed on an image of the exit pupil. Each fringe corresponds to one wavelength of separation between the actual image-forming wave front and the Gaussian reference sphere. The principle originates from a paper by W. P. Linnik published in Russian and German in 1933. A translation is included as an appendix. Four variations on Linnik's design are discussed, one of which avoids the use of transmitting optics and normal incidence reflections altogether and could therefore be used at ultraviolet or soft x-ray wavelengths.
描述了一种能够定量显示任何成像光学系统波前像差的简单干涉测量方法。展示了该方法在与短波长使用相同共轭面上测试和对准掠入射反射光学器件的应用。将被测系统的成像波前与干涉仪内从预期焦点处的一点产生的真实球面波前进行比较。差异以叠加在出射光瞳图像上的条纹图案显示。每个条纹对应于实际成像波前与高斯参考球面之间一个波长的间距。该原理源自W. P. 林尼克于1933年用俄语和德语发表的一篇论文。附录中包含了该论文的译文。讨论了林尼克设计的四种变体，其中一种完全避免了使用透射光学器件和正入射反射，因此可用于紫外或软X射线波长。
