Mercer C R, Creath K
Appl Opt. 1996 Apr 1;35(10):1633-42. doi: 10.1364/AO.35.001633.
A new instrument, the liquid-crystal point-diffraction interferometer (LCPDI), is developed for the measurement of phase objects. This instrument maintains the compact, robust design of Linnik's point-diffraction interferometer and adds to it a phase-stepping capability for quantitative interferogram analysis. The result is a compact, simple to align, environmentally insensitive interferometer capable of accurately measuring optical wave fronts with very high data density and with automated data reduction. We describe the theory and design of the LCPDI. A focus shift was measured with the LCPDI, and the results are compared with theoretical results.
一种用于测量相位物体的新型仪器——液晶点衍射干涉仪(LCPDI)被研制出来。该仪器保持了林尼克点衍射干涉仪紧凑、坚固的设计,并增加了用于定量干涉图分析的相移能力。其结果是一种紧凑、易于对准、对环境不敏感的干涉仪,能够以非常高的数据密度精确测量光波前并实现自动数据处理。我们描述了LCPDI的理论和设计。用LCPDI测量了焦移,并将结果与理论结果进行了比较。