Preparation of born-doped a-SiC:H thin films by ICP-CVD method and to the application of large-area heterojunction solar cells.

Hydrogenated amorphous silicon carbide (a-SiC:H) film has been widely used as an emitter p layer in solar cells. For the better p layer, wide optical bandgap, and high electrical conductivity should be obtained from the effective method. We prepared the boron-doped a-SiC:H thin films using inductively coupled plasma chemical vapor deposition (ICP-CVD) method and characteristics on the small-area (2 cm x 2 cm) as well as the large-area films (diameter of 100 mm) were shown on it. As a substrate, the n-type (100) oriented CZ c-Si (5.5 approximately 6.5 omega x cm, 650 microm) wafers were used and cleaned by using the reduced RCA method. A silane (SiH4) of 99.999% purity, H2 and 60% hydrogen diluted ethylene (C2H4) was used as source gas for the deposition of intrinsic a-SiC:H films, and then diborane (B2H6), as the doping gas, is added to C2H4 and SiH4/H2 during the deposition of films. The uniformity of thickness and optical bandgap from large-area as-dep. films was at 1.8% and 0.3%, respectively. Heterojunction solar cell with 2 wt%-AZO/p-a-SiC:H/i-a-Si:H/c-Si/Ag structure was fabricated and characterized with diameter of 152.3 mm in this large-area ICP-CVD system. Conversion efficiency of 9.123% was achieved with a practical area of 100 mm x 100 mm, which can show the potentials to the fabrication of the large-area solar cell using ICP-CVD method.