Wiesner Markus, Ihlemann Jürgen, Müller Heike H, Lankenau Eva, Hüttmann Gereon
Laser-Laboratorium Göttingen e.V., Hans-Adolf-Krebs-Weg 1, D-37077 Göttingen, Germany.
Rev Sci Instrum. 2010 Mar;81(3):033705. doi: 10.1063/1.3356080.
In situ surface imaging for nondestructive evaluation (NDE) by optical coherence tomography (OCT) before, during, and after ablative laser processing is presented. Furthermore, it is shown that the ability of in situ characterization is beneficial for samples such as optical fibers, which are difficult to handle in the standard analysis. Surface images taken by the OCT are compared with these common analysis tools such as scanning electron microscopy (SEM), reflected-light, and confocal microscopy. An axial resolution of approximately 126 nm for surface detection and a lateral resolution <2.5 microm are obtained and the potential of the setup to imaging structures with high aspect ratio is demonstrated.
本文介绍了在烧蚀激光加工之前、期间和之后，通过光学相干断层扫描（OCT）进行原位表面成像以进行无损评估（NDE）。此外，还表明原位表征能力对于诸如光纤之类在标准分析中难以处理的样品是有益的。将OCT拍摄的表面图像与扫描电子显微镜（SEM）、反射光显微镜和共聚焦显微镜等这些常见分析工具进行了比较。获得了用于表面检测的约126 nm的轴向分辨率和小于2.5微米的横向分辨率，并展示了该装置对高纵横比结构成像的潜力。
