固液比可变的PZT复合厚膜的介电和压电性能
Dielectric and Piezoelectric Properties of PZT Composite Thick Films with Variable Solution to Powder Ratios.
作者信息
Wu Dawei, Zhou Qifa, Shung Koping Kirk, Bharadwaja Srowthi N, Zhang Dongshe, Zheng Haixing
机构信息
Department of Biomedical Engineering, NIH Transducer Resource Center University of Southern California, Los Angeles, California 90089.
出版信息
J Am Ceram Soc. 2009 May 8;92(6):1276-1279. doi: 10.1111/j.1551-2916.2009.03065.x.
The use of PZT films in sliver-mode high-frequency ultrasonic transducers applications requires thick, dense, and crack-free films with excellent piezoelectric and dielectric properties. In this work, PZT composite solutions were used to deposit PZT films >10 μm in thickness. It was found that the functional properties depend strongly on the mass ratio of PZT sol-gel solution to PZT powder in the composite solution. Both the remanent polarization, P(r), and transverse piezoelectric coefficient, e(31,) (f), increase with increasing proportion of the sol-gel solution in the precursor. Films prepared using a solution-to-powder mass ratio of 0.5 have a remanent polarization of 8 μC/cm(2), a dielectric constant of 450 (at 1 kHz), and e(31,) (f) = -2.8 C/m(2). Increasing the solution-to-powder mass ratio to 6, the films were found to have remanent polarizations as large as 37 μC/cm(2), a dielectric constant of 1250 (at 1 kHz) and e(31,) (f) = -5.8 C/m(2).
在银模式高频超声换能器应用中使用锆钛酸铅（PZT）薄膜需要具有优异压电和介电性能的厚、致密且无裂纹的薄膜。在这项工作中，使用PZT复合溶液来沉积厚度大于10μm的PZT薄膜。发现功能特性强烈依赖于复合溶液中PZT溶胶 - 凝胶溶液与PZT粉末的质量比。剩余极化强度P(r)和横向压电系数e(31,)(f)均随着前驱体中溶胶 - 凝胶溶液比例的增加而增加。使用溶液与粉末质量比为0.5制备的薄膜具有8μC/cm²的剩余极化强度、450（在1kHz时）的介电常数以及e(31,)(f)= -2.8C/m²。将溶液与粉末质量比增加到6时，发现薄膜具有高达37μC/cm²的剩余极化强度、1250（在1kHz时）的介电常数以及e(31,)(f)= -5.8C/m²。
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