Wu Dawei, Zhou Qifa, Shung Koping Kirk, Bharadwaja Srowthi N, Zhang Dongshe, Zheng Haixing
Department of Biomedical Engineering, NIH Transducer Resource Center University of Southern California, Los Angeles, California 90089.
J Am Ceram Soc. 2009 May 8;92(6):1276-1279. doi: 10.1111/j.1551-2916.2009.03065.x.
The use of PZT films in sliver-mode high-frequency ultrasonic transducers applications requires thick, dense, and crack-free films with excellent piezoelectric and dielectric properties. In this work, PZT composite solutions were used to deposit PZT films >10 μm in thickness. It was found that the functional properties depend strongly on the mass ratio of PZT sol-gel solution to PZT powder in the composite solution. Both the remanent polarization, P(r), and transverse piezoelectric coefficient, e(31,) (f), increase with increasing proportion of the sol-gel solution in the precursor. Films prepared using a solution-to-powder mass ratio of 0.5 have a remanent polarization of 8 μC/cm(2), a dielectric constant of 450 (at 1 kHz), and e(31,) (f) = -2.8 C/m(2). Increasing the solution-to-powder mass ratio to 6, the films were found to have remanent polarizations as large as 37 μC/cm(2), a dielectric constant of 1250 (at 1 kHz) and e(31,) (f) = -5.8 C/m(2).
在银模式高频超声换能器应用中使用锆钛酸铅（PZT）薄膜需要具有优异压电和介电性能的厚、致密且无裂纹的薄膜。在这项工作中，使用PZT复合溶液来沉积厚度大于10μm的PZT薄膜。发现功能特性强烈依赖于复合溶液中PZT溶胶 - 凝胶溶液与PZT粉末的质量比。剩余极化强度P(r)和横向压电系数e(31,)(f)均随着前驱体中溶胶 - 凝胶溶液比例的增加而增加。使用溶液与粉末质量比为0.5制备的薄膜具有8μC/cm²的剩余极化强度、450（在1kHz时）的介电常数以及e(31,)(f)= -2.8C/m²。将溶液与粉末质量比增加到6时，发现薄膜具有高达37μC/cm²的剩余极化强度、1250（在1kHz时）的介电常数以及e(31,)(f)= -5.8C/m²。
