微机械高频（80MHz）PZT 厚膜线性阵列。
Micro-machined high-frequency (80 MHz) PZT thick film linear arrays.
机构信息
Resource Center for Medical Ultrasonic Transducer Technology, University of Southern California, Los Angeles, CA, USA.
出版信息
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Oct;57(10):2213-20. doi: 10.1109/TUFFC.2010.1680.
Abstract
This paper presents the development of a micromachined high-frequency linear array using PZT piezoelectric thick films. The linear array has 32 elements with an element width of 24 μm and an element length of 4 mm. Array elements were fabricated by deep reactive ion etching of PZT thick films, which were prepared from spin-coating of PZT sol-gel composite. Detailed fabrication processes, especially PZT thick film etching conditions and a novel transferring-and-etching method, are presented and discussed. Array designs were evaluated by simulation. Experimental measurements show that the array had a center frequency of 80 MHz and a fractional bandwidth (-6 dB) of 60%. An insertion loss of -41 dB and adjacent element crosstalk of -21 dB were found at the center frequency.
摘要
本文介绍了一种使用 PZT 压电厚膜制作的高频微机械线性阵列的研制。该线性阵列有 32 个单元，单元宽度为 24μm，长度为 4mm。通过 PZT 厚膜的深反应离子刻蚀制作了阵列单元，PZT 厚膜是由 PZT 溶胶-凝胶复合旋涂而成。详细的制作工艺，尤其是 PZT 厚膜刻蚀条件和一种新颖的转移-刻蚀方法，都进行了介绍和讨论。通过模拟对阵列设计进行了评估。实验测量表明，该阵列的中心频率为 80MHz，带宽（-6dB）为 60%。在中心频率处，插入损耗为-41dB，相邻单元串扰为-21dB。
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