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柱状 PS-b-PMMA 薄膜中微畴取向对厚度的依赖性。

Microdomain orientation dependence on thickness in thin films of cylinder-forming PS-b-PMMA.

机构信息

Laboratorio MDM, INFM-CNR Via Olivetti 2, 20041 Agrate Brianza, Italy.

出版信息

Nanotechnology. 2010 May 7;21(18):185304. doi: 10.1088/0957-4484/21/18/185304. Epub 2010 Apr 9.

Abstract

The self-assembly of block-copolymer thin films in periodic nanostructures has received considerable attention during the last decade due to their potential applications in nanofabrication and nanolithography. We followed the morphologies developed in thin films of a cylinder-forming diblock copolymer polystyrene-b-poly(methylmethacrylate) ((PS-b-PMMA), PS 46.1 kg mol( - 1), PMMA 21.0 kg mol( - 1), lattice spacing L(0) = 36 nm), as a function of the film thickness (t), analyzing the effect of thickness commensurability on domain orientation in respect to the substrate. The study was circumscribed to the unexplored range of thickness below L(0). Two thickness windows with perpendicular orientation of the PMMA domains were identified: a well-known window at t approximately L(0) and a new window at t approximately L(0)/2. A half-parallel cylinder morphology was observed for [Formula: see text] with a progressive change in morphology [Formula: see text] when thickness increases from L(0)/2 to L(0). This experimental evidence provides new insights on the mechanism of block copolymers self-organization and indicates the possibility to tune the thickness of the nanostructured polymeric film below L(0), allowing the fabrication of ultrathin soft masks for advanced lithographic processes.

摘要

由于在纳米制造和纳米光刻中的潜在应用,过去十年中,嵌段共聚物薄膜在周期性纳米结构中的自组装受到了相当大的关注。我们研究了由圆柱形成嵌段共聚物聚苯乙烯-嵌段-聚甲基丙烯酸甲酯((PS-b-PMMA),PS 46.1 kg mol(-1),PMMA 21.0 kg mol(-1),晶格间距 L(0) = 36 nm)组成的薄膜中形态的发展,作为薄膜厚度(t)的函数,分析了厚度协调性对与基底取向的域的影响。研究范围限于尚未探索的低于 L(0)的厚度范围。确定了 PMMA 域垂直取向的两个厚度窗口:在 t 约等于 L(0)处的一个熟知的窗口和在 t 约等于 L(0)/2 处的一个新窗口。当厚度从 L(0)/2 增加到 L(0)时,观察到[Formula: see text]的半平行圆柱形态,形态[Formula: see text]发生了渐进变化。这一实验证据为嵌段共聚物自组织的机制提供了新的见解,并表明有可能在低于 L(0)的厚度下调整纳米结构化聚合物薄膜的厚度,从而为先进的光刻工艺制造超薄膜软掩模。

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