Oikawa M, Iga K
Tokyo Institute of Technology, Research Laboratorie of Precision Machinery & Electronics, 4259 Nagatsuta, Midoriku, Yokohama 227, Japan.
Appl Opt. 1982 Mar 15;21(6):1052-6. doi: 10.1364/AO.21.001052.
Planar technology has been used to make a microlens array monolithically. By selectively diffusing a dopant into the planar substrate a distributed-index planar microlens has been realized. The monomer exchange technique for the plastic substrate and ion exchange and electromigration techniques for the glass substrate are used. In particular a 2-D planar microlens array was fabricated in a glass substrate. Each microlens was 1.2 mm in diameter and the focal length was 9.4 mm. The focused spot of the collimated He-Ne laser beam was as small as 17 micromphi.
平面技术已被用于单片制造微透镜阵列。通过将掺杂剂选择性地扩散到平面衬底中，实现了一种分布折射率平面微透镜。采用了用于塑料衬底的单体交换技术以及用于玻璃衬底的离子交换和电迁移技术。特别是在玻璃衬底上制造了二维平面微透镜阵列。每个微透镜的直径为1.2毫米，焦距为9.4毫米。准直氦氖激光束的聚焦光斑小至17微米。
