（铝，镓）砷化物/砷化镓多量子阱平面波导的光学特性以及通过反应离子刻蚀制备单模脊形波导和定向耦合器
Optical properties of (Al,Ga)As/GaAs multiple quantum well planar waveguides and the fabrication of single-mode rib waveguides and directional couplers by reactive ion etching.
作者信息
Macbean M D, Mikami O, Wilkinson C D, Mistry P, Roberts J S
出版信息
Appl Opt. 1987 Jul 1;26(13):2625-30. doi: 10.1364/AO.26.002625.
PMID:20489932
Abstract
An anisotropic absorption edge was observed in an (Al,Ga)As/GaAs multiple quantum well double-heterostructure (MQW-DH) single-mode planar optical waveguide. Single-mode rib waveguides and directional couplers were fabricated by SiCl(4) reactive ion etching. The results were found to be consistent with the assumption that the refractive index of the MQW structure for TE propagation is given by the weighted rms average value of the refractive indices of the constituent layers.
摘要
在一个（铝，镓）砷/砷化镓多量子阱双异质结构（MQW - DH）单模平面光波导中观察到了各向异性吸收边。通过四氯化硅反应离子蚀刻制造了单模脊形波导和定向耦合器。结果发现与以下假设一致，即对于TE传播，MQW结构的折射率由组成层折射率的加权均方根平均值给出。
相似文献
1
Optical properties of (Al,Ga)As/GaAs multiple quantum well planar waveguides and the fabrication of single-mode rib waveguides and directional couplers by reactive ion etching.
Appl Opt. 1987 Jul 1;26(13):2625-30. doi: 10.1364/AO.26.002625.
2
Single-mode GaAs/AIGaAs W waveguides with a low propagation loss.
Appl Opt. 1996 Feb 20;35(6):928-33. doi: 10.1364/AO.35.000928.
3
Rib waveguide switches with MOS electrooptic control for monolithic integrated optics in GaAs-Al(x)Ga(1-x)As.
Appl Opt. 1978 Aug 15;17(16):2548-55. doi: 10.1364/AO.17.002548.
4
Mode control of Ti-diffused LiNbO(3) slab optical waveguide.
Appl Opt. 1977 Sep 1;16(9):2546-9. doi: 10.1364/AO.16.002546.
5
Planar fabrication process of a high-coupling-efficiency interface between optical waveguides of large index difference.
Appl Opt. 1995 Aug 20;34(24):5366-74. doi: 10.1364/AO.34.005366.
6
Efficient optical waveguide coupler.
Appl Opt. 1980 Mar 1;19(5):790-801. doi: 10.1364/AO.19.000790.
7
Ultra-sensitive mid-infrared evanescent field sensors combining thin-film strip waveguides with quantum cascade lasers.
Analyst. 2012 May 21;137(10):2322-7. doi: 10.1039/c1an15787f. Epub 2012 Jan 17.
8
Propagation characteristics of GaAsP heterostructure waveguides for 1.06 microm and 0.905 mum wavelengths: an evaluation.
Appl Opt. 1976 Mar 1;15(3):789-92. doi: 10.1364/AO.15.000789.
9
Planar and ridge waveguides formed in LiNbO3 by proton exchange combined with oxygen ion implantation.
Opt Express. 2010 Jul 19;18(15):15609-17. doi: 10.1364/OE.18.015609.
10
An all-silicon, single-mode Bragg cladding rib waveguide.
Opt Express. 2010 Apr 26;18(9):8816-23. doi: 10.1364/OE.18.008816.
Zotero 插件