Johnson Jay, Harris Tequila
The G. W. Woodruff School of Mechanical Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332, USA.
Appl Opt. 2010 May 20;49(15):2920-8. doi: 10.1364/AO.49.002920.
A novel bidirectional thickness profilometer based on transmission densitometry was designed to measure the localized thickness of semitransparent films on a dynamic manufacturing line. The densitometer model shows that, for materials with extinction coefficients between 0.3 and 2.9?D/mm, 100-500microm measurements can be recorded with less than +/-5% error at more than 10,000 locations in real time. As a demonstration application, the thickness profiles of 75mmx100?mm regions of polymer electrolyte membrane (PEM) were determined by converting the optical density of the sample to thickness with the Beer-Lambert law. The PEM extinction coefficient was determined to be 1.4D/mm, with an average thickness error of 4.7%.
设计了一种基于透射密度测定法的新型双向厚度轮廓仪，用于测量动态生产线上半透明薄膜的局部厚度。密度计模型表明，对于消光系数在0.3至2.9 D/mm之间的材料，在超过10000个位置上实时记录100 - 500微米的测量值时，误差小于±5%。作为一个示范应用，通过利用比尔-朗伯定律将样品的光密度转换为厚度，测定了聚合物电解质膜（PEM）75mm×100mm区域的厚度轮廓。PEM的消光系数测定为1.4 D/mm，平均厚度误差为4.7%。
