Borgogno J P, Lazarides B, Pelletier E
Centre d'Etude des Couches Minces, associe au CNRS (LA15), Ecole Nationale Superieure de Physique, Domaine Universitaire de Saint Jerome, 13397 Marseille Cedex 4, France.
Appl Opt. 1982 Nov 15;21(22):4020-9. doi: 10.1364/AO.21.004020.
The refractive index of a layer is a sensitive function of the preparation conditions. Normal incidence measurement of the optical properties can reveal possible inhomogeneity of index. We propose a method of automatic determination of the complex refractive index and thickness of a layer which includes systematic measurement of the degree of inhomogeneity which is represented by a simple model. The usefulness of the technique is demonstrated by examples that form part of an experimental study of a number of useful optical materials including Y(2)O(3), TiO(2), MgF(2), HfO(2), and SiO(2). The dispersions of the refractive index, the extinction coefficient, and of the inhomogeneity are represented by Cauchy formulas with accurately determined coefficients. The results can therefore be readily used in computing the optical properties of thin-film multilayers.
一层材料的折射率是制备条件的敏感函数。光学性质的正入射测量可以揭示折射率可能存在的不均匀性。我们提出了一种自动测定一层材料的复折射率和厚度的方法，该方法包括系统测量由一个简单模型表示的不均匀程度。通过一些有用光学材料（包括Y(2)O(3)、TiO(2)、MgF(2)、HfO(2)和SiO(2)）的实验研究中的示例，证明了该技术的实用性。折射率、消光系数和不均匀性的色散由具有精确确定系数的柯西公式表示。因此，这些结果可以很容易地用于计算薄膜多层结构的光学性质。
