Microsystems IC Design Lab., CEA LETI, Minatec, Grenoble, France.
IEEE Trans Ultrason Ferroelectr Freq Control. 2010 Jun;57(6):1285-95. doi: 10.1109/TUFFC.2010.1549.
A novel tuning strategy of nanoelectromechanical systems (NEMS)-based filters is proposed based on the modal control of mechanically coupled NEMS arrays. This is done by adjusting separately addressed distributed actuation and detection configurations proportionally to desired modal vectors. This control scheme enhances the global output signal, raising the power handling of the filter on all channels. Although the modal control of 1-D arrays exhibits narrow-band responses with adjustable resonance frequency, its application to 2-D arrays produces filters with both adjustable bandwidth and central frequency. One possible realization scheme is suggested by using electrostatically driven coupled NEMS arrays whose transduction gains are adjusted by changing the electrodes¿ bias voltages. Dispersion effects on both 1-D array and 2-D array frequency response are analytically expressed using eigenvalues perturbation theory. Based on these results, we show how to reduce their impact by appropriately choosing the coupling stiffness and the number of resonators.
提出了一种基于机械耦合的纳米机电系统（NEMS）阵列模态控制的新型 NEMS 滤波器调谐策略。通过分别调整寻址的分布式激励和检测配置成比例地调整所需的模态向量来实现这一点。该控制方案增强了全局输出信号，提高了所有通道上滤波器的功率处理能力。虽然一维数组的模态控制具有可调谐共振频率的窄带响应，但将其应用于二维数组会产生具有可调带宽和中心频率的滤波器。通过使用静电驱动的耦合 NEMS 阵列提出了一种可能的实现方案，其转换增益通过改变电极的偏置电压来调节。使用特征值摄动理论分析表示了一维数组和二维数组频率响应的色散效应。基于这些结果，我们展示了如何通过适当选择耦合刚度和谐振器数量来降低它们的影响。
