Häusler G, Herrmann J M
Appl Opt. 1988 Nov 15;27(22):4631-7. doi: 10.1364/AO.27.004631.
We discuss the limits of optical range sensing by shearing interferometry for diffusely reflecting objects. The basic principle is the following: the radius of a wave that is scattered at the object under test is measured by shearing interferometry. This radius is the desired distance. We show that the limits of the method are mainly determined by speckle. With coherent light depth resolution cannot be increased considerably beyond the Rayleigh depth of focus. With partially coherent light a rms depth resolution of 68 microm at a distance of 380 mm (1:5500) was achieved. This resolution is 25 times better than the Rayleigh limit. The working aperture is very small (0.013); shading problems are minimized.
我们讨论了用于漫反射物体的剪切干涉法光学测距的局限性。基本原理如下：通过剪切干涉法测量在被测物体上散射的波的半径。该半径即为所需的距离。我们表明该方法的局限性主要由散斑决定。使用相干光时，深度分辨率无法大幅提高到超出瑞利焦深。使用部分相干光时，在380毫米（1:5500）的距离处实现了均方根深度分辨率为68微米。该分辨率比瑞利极限好25倍。工作孔径非常小（0.013）；阴影问题被最小化。
